Product overview

The CO₂ liquid Cleaner is a high-performance cleaning system that utilizes liquid CO₂ jet technology to remove microscopic contaminants from sensitive surfaces. Unlike traditional dry ice blasting, this system uses pressurized liquid carbon dioxide to deliver a gentler yet highly effective cleaning action — ideal for precision industries such as semiconductor, display panel, and PCB manufacturing.

By combining physical jet impact, thermal shock, and sublimation expansion, the CO₂ liquid Cleaner ensures efficient removal of organic and inorganic particles without moisture, abrasion, or residue, making it a preferred choice for cleanroom environments.

       Technical specifications

Item	Description
Machine Type	Mobile & Manual Cleaning
Main Module	Single Port (201) / Multi Port (202 / 204)
Nozzle Type	Pen Type / Bar Type
Cleaning Target	Glass and Display Surface Cleaning
Dimension (SM201)	W386 × D280 × H253 mm
Power Supply	220VAC, 50/60Hz, 1 Phase, 5A
Compressed Air (CDA)	5–8 kg/cm², Max. 3 m³/min
CO₂ Supply	Liquid CO₂ (≥6MPa, ≥–18°C)
CO₂ Consumption	Depends on nozzle configuration

Semiconductor manufacturing: Wafer, CP/FT process cleaning

Display industry: Glass substrate and panel surface cleaning

Electronics assembly: PCB and micro-component cleaning

Optical and precision devices: Lens and optical part cleaning in cleanrooms

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